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翻訳と辞書　辞書検索 [ 開発暫定版 ] スポンサード リンク Hydrogen silsesquioxane ： ウィキペディア英語版 Hydrogen silsesquioxane Hydrogen silsesquioxane (HSQ) is class of inorganic compounds with the chemical formula ()n. Such clusters are specific representatives of the family of silsesquioxanes with the formula ()n (R = alkyl, halide, alkoxide, etc.). The most widely studied member of the hydrogen silsesquioxanes is the cubic cluster H8Si8O12. Thin HSQ layers have been used to show very high resolution (~10 nm) feature sizes. Thickness of the coated resist has been reported to play a major role in the achievable resolution. It can be cross-linked by exposure to e-beam or EUV radiation with wavelengths shorter than 157 nm. ==References== 抄文引用元・出典: フリー百科事典『 ウィキペディア（Wikipedia）』 ■ウィキペディアで「Hydrogen silsesquioxane」の詳細全文を読む スポンサード リンク 翻訳と辞書 : 翻訳のためのインターネットリソース Copyright(C) kotoba.ne.jp 1997-2016. All Rights Reserved.